Processing-Induced Defects in Epitaxially Grown p- and n-Type SiGe |
| Journal |
Defect and Diffusion Forum (Volumes 200 - 202) |
| Volume |
Defects and Diffusion in Semiconductors IV |
| Edited by |
D.J. Fisher |
| Pages |
161-176 |
| DOI |
10.4028/www.scientific.net/DDF.200-202.161 |
| Citation |
M. Mamor et al., 2001, Defect and Diffusion Forum, 200-202, 161 |
| Authors |
M. Mamor, F. Danie Auret, S.A. Goodman |
| Keywords |
Defect Engineering, DLTS, Electron Beam Metallization, Ion Etching, Particle Irradiation |
| Full Paper |
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