Paper Title:
Internal Friction of Copper Thin Layers on Silicon Substrates
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 203-205)
Edited by
D.J. Fisher
Pages
285-288
DOI
10.4028/www.scientific.net/DDF.203-205.285
Citation
J. von der Hagen, M. Weller, E. Arzt, "Internal Friction of Copper Thin Layers on Silicon Substrates", Defect and Diffusion Forum, Vols. 203-205, pp. 285-288, 2002
Online since
February 2002
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Price
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