Structural and Electrical Study of 4H-SiC CVD-Grown Layer with Micropipe Dissociation |
|
| Journal | Defect and Diffusion Forum (Volumes 206 - 207) |
|---|---|
| Volume | Defects and Diffusion in Ceramics |
| Edited by | D.J. Fisher |
| Pages | 111-116 |
| DOI | 10.4028/www.scientific.net/DDF.206-207.111 |
| Authors | Isaho Kamata, Hidekazu Tsuchida, Tamotsu Jikimoto, Kunikaza Izumi |
| Keywords | 4H-SiC, I-V Characteristic, Micropipe, Micropipe Dissociation, Screw Dislocations |
| Full Paper | 
Get the full paper by clicking here
|