Structural and Electrical Study of 4H-SiC CVD-Grown Layer with Micropipe Dissociation |
| Journal |
Defect and Diffusion Forum (Volumes 206 - 207) |
| Volume |
Defects and Diffusion in Ceramics |
| Edited by |
D.J. Fisher |
| Pages |
111-116 |
| DOI |
10.4028/www.scientific.net/DDF.206-207.111 |
| Citation |
Isaho Kamata et al., 2002, Defect and Diffusion Forum, 206-207, 111 |
| Authors |
Isaho Kamata, Hidekazu Tsuchida, Tamotsu Jikimoto, Kunikaza Izumi |
| Keywords |
I-V Characteristic, 4H-SiC, Micropipe, Micropipe Dissociation, Screw Dislocations |
| Full Paper |
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