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Structural and Electrical Study of 4H-SiC CVD-Grown Layer with Micropipe Dissociation

Journal Defect and Diffusion Forum (Volumes 206 - 207)
Volume Defects and Diffusion in Ceramics
Edited by D.J. Fisher
Pages 111-116
DOI 10.4028/www.scientific.net/DDF.206-207.111
Citation Isaho Kamata et al., 2002, Defect and Diffusion Forum, 206-207, 111
Authors Isaho Kamata, Hidekazu Tsuchida, Tamotsu Jikimoto, Kunikaza Izumi
Keywords I-V Characteristic, 4H-SiC, Micropipe, Micropipe Dissociation, Screw Dislocations
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