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Structural Defects and Electrical Properties of N/Ge Co-Implanted GaN

Journal Defect and Diffusion Forum (Volumes 206 - 207)
Volume Defects and Diffusion in Ceramics
Edited by D.J. Fisher
Pages 75-86
DOI 10.4028/www.scientific.net/DDF.206-207.75
Citation Yoshitaka Nakano et al., 2002, Defect and Diffusion Forum, 206-207, 75
Authors Yoshitaka Nakano, Takashi Jimbo
Keywords Activation, Defect, Doping, Galium Nitride (GaN), Germanium, Implantation, Nitrogen, Positron
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