Metastablility of Interstitial Clusters in Ion-Damaged Silicon Studied by Isothermal Capacitance Transient Spectroscopy |
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| Journal | Defect and Diffusion Forum (Volumes 210 - 212) |
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| Volume | Defects and Diffusion in Semiconductors |
| Edited by | D.J. Fisher |
| Pages | 1-14 |
| DOI | 10.4028/www.scientific.net/DDF.210-212.1 |
| Citation | P.K. Giri, 2002, Defect and Diffusion Forum, 210-212, 1 |
| Authors | P.K. Giri |
| Keywords | DLTS, Interstitial Clusters, Ion-Implantation, Metastable Defects, Silicon |
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