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A Simple Method for Determining the Bascie Diffusion Parameters of Dopants using an Analytical Form of the Concentration Profile

Journal Defect and Diffusion Forum (Volumes 210 - 212)
Volume Defects and Diffusion in Semiconductors
Edited by D.J. Fisher
Pages 113-122
DOI 10.4028/www.scientific.net/DDF.210-212.113
Citation E. Antoncik, 2002, Defect and Diffusion Forum, 210-212, 113
Authors E. Antoncik
Keywords Diffusion Coefficient, In-Diffusion, Profile, Reaction-Diffusion Equations
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