Cavity Formation in Helium-Implanted Silicon - Temperature Dependence |
| Journal |
Defect and Diffusion Forum (Volumes 210 - 212) |
| Volume |
Defects and Diffusion in Semiconductors |
| Edited by |
D.J. Fisher |
| Pages |
37-42 |
| DOI |
10.4028/www.scientific.net/DDF.210-212.37 |
| Citation |
Jean François Barbot et al., 2002, Defect and Diffusion Forum, 210-212, 37 |
| Authors |
Jean François Barbot, Erwan Oliviero, Marie-Laure David, Sophie Rousselet, Marie France Beaufort, A. van Veen |
| Keywords |
Cavities, Electron Microscopy, Helium Implantation, Silicon, Thermal Desorption |
| Full Paper |
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