Paper Title:
Structural Defects in Amorphous Silicon Oxynitride and Silicon Nitride
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 218-220)
Edited by
D.J. Fisher
Pages
39-50
DOI
10.4028/www.scientific.net/DDF.218-220.39
Citation
H. Kato, Y. Ohki, "Structural Defects in Amorphous Silicon Oxynitride and Silicon Nitride ", Defect and Diffusion Forum, Vols. 218-220, pp. 39-50, 2003
Online since
August 2003
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