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In-Diffusion Concentration Profiles of Dopants in Semiconductors

Journal Defect and Diffusion Forum (Volumes 221 - 223)
Volume Defects and Diffusion in Semiconductors
Edited by D.J. Fisher
Pages 109-122
DOI 10.4028/www.scientific.net/DDF.221-223.109
Citation E. Antoncik, 2003, Defect and Diffusion Forum, 221-223, 109
Authors E. Antoncik
Keywords Diffusion Coefficient, In-Diffusion, Profile, Reaction-Diffusion Equations
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