Diodes Fabricated by Electron Beam Doping (Superdiffusion)Technique in Semiconductors at Room Temperature |
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| Journal | Defect and Diffusion Forum (Volumes 221 - 223) |
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| Volume | Defects and Diffusion in Semiconductors |
| Edited by | D.J. Fisher |
| Pages | 23-30 |
| DOI | 10.4028/www.scientific.net/DDF.221-223.23 |
| Citation | Takao Wada et al., 2003, Defect and Diffusion Forum, 221-223, 23 |
| Authors | Takao Wada, Hiroshi Fujimoto |
| Keywords | Electron Beam Doping, Non-Equilibrium Process |
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