Paper Title:
Diodes Fabricated by Electron Beam Doping (Superdiffusion)Technique in Semiconductors at Room Temperature
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Periodical
Defect and Diffusion Forum (Volumes 221-223)
Edited by
D.J. Fisher
Pages
23-30
DOI
10.4028/www.scientific.net/DDF.221-223.23
Citation
T. Wada, H. Fujimoto, "Diodes Fabricated by Electron Beam Doping (Superdiffusion)Technique in Semiconductors at Room Temperature ", Defect and Diffusion Forum, Vols. 221-223, pp. 23-30, 2003
Online since
November 2003
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