Makyoh Topography: A Simple Yet Powerful Optical Method for Surface Flatness and Defect Characterisation |
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| Journal | Defect and Diffusion Forum (Volumes 221 - 223) |
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| Volume | Defects and Diffusion in Semiconductors |
| Edited by | D.J. Fisher |
| Pages | 51-62 |
| DOI | 10.4028/www.scientific.net/DDF.221-223.51 |
| Citation | Ferenc Riesz, 2003, Defect and Diffusion Forum, 221-223, 51 |
| Authors | Ferenc Riesz |
| Keywords | Makyoh Topography, Optical Characterisation Techniques, Surface Defects, Surface Flatness, Surface Morphology |
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