Nitrogen in Silicon |
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| Journal | Defect and Diffusion Forum (Volumes 230 - 232) |
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| Volume | Defects and Diffusion in Semiconductors - An Annual Retrospective VII |
| Edited by | David J. Fisher |
| Pages | 199-220 |
| DOI | 10.4028/www.scientific.net/DDF.230-232.199 |
| Citation | De Ren Yang et al., 2004, Defect and Diffusion Forum, 230-232, 199 |
| Authors | De Ren Yang, Xuegong Yu |
| Keywords | Nitrogen Doping, Oxygen Precipitation, Silicon, Void |
| Full Paper | 
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