Results of microstructural investigations of aluminide coatings modified by Si are presented in this work. Protective coating (TiAlSi type) was deposited by Arc-PVD. Thickness of the outside layer of deposited coating was 35µm and it contained TiAl3 phase modified by Si as a main component. The second layer was found as a transition area between the TiAl3 outside layer and the surface of TiAlCrNb substrate. Thickness of the inside sublayer was 5 µm. The diffusion treatment caused the progress of coating homogenisation from the point of view of phase and chemical composition. It was found that the coating consisted of the dominant TiAl3 phase and Ti5Si3 in thick outer sublayer and only TiAl2 phase in transition thin sublayer. Below the transition area, on the surface of TiAlCrNb substrate alloy, the layer of g−TiAl was found. The amount of silicides was increased in comparison with the coating only after the Arc-PVD process and the area of its presence had been removed in the outside direction of the coating.