Paper Title:
Iridium Diffusion into Silicon Wafers as a Means to Determine Silicon Vacancy Concentrations
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 237-240)
Edited by
M. Danielewski, R. Filipek, R. Kozubski, W. Kucza, P. Zieba, Z. Zurek
Pages
328-333
DOI
10.4028/www.scientific.net/DDF.237-240.328
Citation
L. Lerner, N. Stolwijk, "Iridium Diffusion into Silicon Wafers as a Means to Determine Silicon Vacancy Concentrations", Defect and Diffusion Forum, Vols. 237-240, pp. 328-333, 2005
Online since
April 2005
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Price
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