Paper Title:
Interdiffusion in Co/Ta Multilayer Thin Films
  Abstract

We will discuss the stress release phenomena, structural relaxation and interdiffusion processes during annealing. The [Co(4nm)/Ta(4nm)]38 multilayers were prepared by dc magnetron sputtering on Si substrate. The multilayers were annealed at various temperatures (523 - 673K) in vacuum (under 10-5 torr) furnace. The effective interdiffusion coefficients were determined from the slope of the best straight line fit of the first peak intensity versus annealing time [d ln(I(t)/I(0)) /dt] by X-ray diffraction (XRD) low angle measurements. The drastic decrease of the relative intensity in the initial stage shown due to the structural relaxation was excluded in the calculation of effective interdiffusion coefficients. The temperature dependence of interdiffusion in the range of 523 - 673K is described by D = 3.2×10-19 exp(-0.51±0.11 eV/kT) m2s-1.

  Info
Periodical
Defect and Diffusion Forum (Volumes 237-240)
Edited by
M. Danielewski, R. Filipek, R. Kozubski, W. Kucza, P. Zieba, Z. Zurek
Pages
554-559
DOI
10.4028/www.scientific.net/DDF.237-240.554
Citation
H. M. Lee, B. S. Lee, C. G. Lee, Y. Hayashi, B. H. Koo, "Interdiffusion in Co/Ta Multilayer Thin Films", Defect and Diffusion Forum, Vols. 237-240, pp. 554-559, 2005
Online since
April 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: I. Dahan, M.P. Dariel
Abstract:The present communication is concerned with the interdiffusion kinetics and the interface breakdown that take place in the Nb/NbC multilayer...
879
Authors: K. Chu, Yao Gen Shen
Abstract:Nano-structured TiN/TiBN multilayer thin films were deposited onto unheated Si(100) substrates by reactive unbalanced dc-magnetron...
889
Authors: Yoshihisa Kaneko, T. Sanda, Satoshi Hashimoto
Abstract:Microstructures of Ni/Cu and Ni-Co/Cu multilayers were investigated by X-ray diffraction analysis. These multilayered structures were...
1321
Authors: Jiang Ling Yue, Yan Sheng Yin, Ge Yang Li
Abstract:A series of TiAlN/Si3N4 nano-multilayer films with various Si3N4 layer thicknesses were prepared by reactive magnetron sputtering. These...
489
Authors: Wen Song Lin, Wang Wei, Wei Heng
Abstract:ZnO/Zn3N2 multilayer films were synthesized on slide glass substrates by radio-frequency (RF) magnetron sputtering technology with RF powers...
1827