The diffusion coefficient of In in TiAl has been measured using ion implantation technique and secondary ion mass spectrometry. The diffusion coefficients of Fe and Pd in FePt have been measured at two compositions by radioactive tracer method. In order to clarify diffusion anisotropy, single crystal of each alloy was used. The In diffusion perpendicular to the  axis is faster than that parallel to the  axis. Such trend is similar to Ti diffusion previously measured in our group. The diffusion of Fe in FePt perpendicular to the  axis is faster than that parallel to the  axis at each composition, while the anisotropy of the Pd diffusion is different with composition. The predominant process of the diffusion in perpendicular to the  has been discussed on the basis of the expressions of the diffusion coefficients.