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DFT Analysis of the Indium-Antimony-Vacancy Cluster in Silicon

Journal Defect and Diffusion Forum (Volumes 245 - 246)
Volume Defects and Diffusion in Semiconductors - an Annual Retrospective VIII
Edited by David J. Fisher
Pages 29-38
DOI 10.4028/www.scientific.net/DDF.245-246.29
Citation M.M. De Souza et al., 2005, Defect and Diffusion Forum, 245-246, 29
Online since October, 2005
Authors M.M. De Souza, Jonathan P. Goss
Keywords Antimony, Density Functional Theory (DFT), Indium, Planewave, Pseudopotential, Vacancy Cluster
Abstract

A cluster comprising of indium, antimony and a vacancy in silicon is analysed using the planewave pseudopotential technique. This cluster has a strong binding energy that inhibits indium diffusion after high temperature anneal cycles. Difficulties associated with the simulation of a vacancy using the supercell approach are initially highlighted. In comparison, the indium-antimony-vacancy cluster reveals stronger distortions and reduction in relaxation volume. The indium atom in the relaxed cluster shows nearly six-fold coordination whereas the antimony atom acquires four neighbours. Due to the low symmetry of the centre, in constrast to the isolated vacancy there is no propensity for a Jahn-Teller effect. It gives rise to two defect levels in the bandgap.

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