Modelling of the Gettering by Mechanical Damage of the Metallic Impurities in Silicon |
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| Journal | Defect and Diffusion Forum (Volumes 251 - 252) |
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| Volume | Defects and Diffusion Ceramics Abstracts |
| Edited by | David J. Fisher |
| Pages | 27-34 |
| DOI | 10.4028/www.scientific.net/DDF.251-252.27 |
| Citation | F. Ayad et al., 2006, Defect and Diffusion Forum, 251-252, 27 |
| Online since | March, 2006 |
| Authors | F. Ayad, M. Remram |
| Keywords | Gettering, Metallic Impurities, Modeling, Silicon |
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