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Change of Properties of CMOS Image Sensor Irradiated with 9 and 16 MeV Protons

Journal Defect and Diffusion Forum (Volume 272)
Volume Defects and Diffusion in Semiconductors X
Edited by D. J. Fisher
Pages 7-14
DOI 10.4028/www.scientific.net/DDF.272.7
Citation Xiang Ti Meng et al., 2008, Defect and Diffusion Forum, 272, 7
Online since March, 2008
Authors Xiang Ti Meng, Qiang Huang, Xing Yu Wang, Yong Nan Zheng, Ping Fan, Sheng Yun Zhu
Keywords Average Brightness, CMOS Image Sensor, Non-Uniformity, Proton Irradiation
Abstract

The 9 and 16 MeV proton irradiations of CMOS Image Sensor in the fluence range from 5x108 to 4x1010 cm-2 and 5x109 to 1x1013 cm-2 have been carried out respectively. The color pictures and dark output images are captured, and the average brightness of dark output images is calculated. The anti-irradiation fluence thresholds for 9 and 16 MeV protons are about 4x1010 and 5x1012cm-2, respectively. These can be explained by the change of the concentrations of irradiation-induced electron-hole pairs and vacancies in the various layers of CMOS image sensor calculated by the TRIM simulation program.

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