Many studies have emphasized the beneficial effect of niobium on the physical metallurgy of Ni-Cr-Fe alloy 718. Among the different strengthening actions of niobium, such as solid solution hardening and carbide precipitation, the precipitation of niobium with nickel in a strengthening phase γ” (Ni3Nb) during the aging heat treatment has the largest influence on the mechanical properties of alloy 718. The improvement of the niobium distribution and diffusion in the Ni-matrix may allow a more homogenized repartition of γ” precipitates and seems then to be an effective way to upgrade the mechanical properties. As γ” precipitates decompose to the stable δ phase at very long aging times, the study of the effect of carbon, nitrogen and oxygen concentrations on precipitation and dissolution of the δ phase may give information on γ” precipitation and on niobium distribution. It is the purpose of the present work to examine the role that the alloy content of interstitial species plays with the niobium-rich δ phase evolution in alloy 718. Alloy 718 samples were heat treated under hydrogenated argon at 980°C for 0 to 96 hours in order to gradually curb the content of interstitial species by reaction with the reducing atmosphere. Chemical analyses realized by glow discharge mass spectrometry (GDMS) confirmed the reduction of the concentration of these species. Specimens were solution-treated for 1h at 1050°C in an inert atmosphere and furnace cooled. Some of the samples were then aged at 920°C for times ranging from 10 min to 1 hour. The precipitation was measured quantitatively in terms of volume fraction and the morphology of the precipitates was appreciated using scanning electron microscopy (SEM). The differences in the precipitation kinetics and in the microstructure evolution for each interstitial concentration are then discussed.