In this study, MgxZn1-xO thin film with x varied from 0 to 0.3 was deposited on silicon with the orientation of [1 0 0] using the sol-gel method and spin coating technique. The thin film was annealed at 550°C before being used as a template to grow vertically aligned carbon nanotubes (VACNTs). Field emission scanning electron microscopy (FESEM) indicates that the top view of VACNTs’ topography are very similar to the topography of the template used, MgxZn1-xO thin film. When the value of x increased, the grain size of the template becomes larger and rougher, which were also true with the VACNTs. The electrical properties were measured using IV measurement system, which indicates that the conductivity of the VACNTs is directly proportional to the grain size of the template. Raman spectroscopy was used to inspect the crystal orientation.