Paper Title:

A Numerical Simulation Approach to Convection, Buoyancy Effect, Microfiltration and Flow Analysis as an Influential Lead for Designing and Dimensioning in MEMS

Periodical Defect and Diffusion Forum (Volumes 316 - 317)
Main Theme Defects and Diffusion in Ceramics XII
Edited by D.J. Fisher
Pages 127-133
DOI 10.4028/www.scientific.net/DDF.316-317.127
Citation M. Rizwan Malik et al., 2011, Defect and Diffusion Forum, 316-317, 127
Online since May, 2011
Authors M. Rizwan Malik, Tie Lin Shi, Zi Rong Tang, Guang Lan Liao
Keywords COMSOL Multiphysics Software, Fluid Mechanics, Heat Transfer, Incompressible Flow, Numerical Simulation
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Abstract

Multiphysics numerical simulation (MPNS) has certainly acquired a wide acceptance in the modeling, designing and fabrication fields and has been validated for various research applications. But it is important that the method should be thoroughly understood by students of the various fields. Keeping this aim in view, we demonstrate here the MPNS process as applied in several fields, such as: electrostatics, mechanics, chemistry, heat transfer and fluid flow. Four tasks are performed for fifteen hours in order to analyze simulation approaches such as modeling with geometrical parameters, meshing, solution and post-processing methods. Convection, buoyancy effects, microfiltration and flow analysis are investigated. This comprehensive study will enhance appreciation of the basic concepts of design and dimensioning of an object in MEMS for engineers, and help to guide workers in these fields when performing these tasks.