Paper Title:
The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon
  Abstract

  Info
Periodical
Edited by
F.H. Wohlbier and D.J. Fisher
Pages
1-0
DOI
10.4028/www.scientific.net/DDF.37.1
Citation
R.B. Fair, "The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon", Defect and Diffusion Forum, Vol. 37, pp. 1-0, 1984
Online since
January 1991
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Price
$32.00
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