Paper Title:
Defect Related to Nitrogen Implantation in Silicon Single Crystals
  Abstract

  Info
Periodical
Edited by
F.H. Wohlbier
Pages
21-28
DOI
10.4028/www.scientific.net/DDF.48.21
Citation
M. Bode, A. Jacubowicz, H.U. Habermeier, "Defect Related to Nitrogen Implantation in Silicon Single Crystals", Defect and Diffusion Forum, Vol. 48, pp. 21-28, 1987
Online since
January 1987
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Price
$32.00
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