Paper Title:
Ion Implantation in Semiconductors: Role of Diffusion
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 51-52)
Edited by
F.H. Wohlbier
Pages
1-108
DOI
10.4028/www.scientific.net/DDF.51-52.1
Citation
B. Sharma, "Ion Implantation in Semiconductors: Role of Diffusion", Defect and Diffusion Forum, Vols. 51-52, pp. 1-108, 1987
Online since
January 1987
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Price
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