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Comparison of A-Si: H from Plasma Peposition and Chemical Vapour Deposition

Journal Defect and Diffusion Forum (Volumes 53 - 54)
Volume Effects of Modes of Formation on the Structure of Glass
Edited by R.A. Weeks and D.L. Kinser
Pages 43-54
DOI 10.4028/www.scientific.net/DDF.53-54.43
Citation Zi Shang Ding et al., 1987, Defect and Diffusion Forum, 53-54, 43
Authors Zi Shang Ding, Gao Rong Han
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