Paper Title:
Ion Implantation in Oxides on Silicon
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 57-58)
Edited by
F. H. Wöhlbier
Pages
431-443
DOI
10.4028/www.scientific.net/DDF.57-58.431
Citation
A. Vengurlekar, "Ion Implantation in Oxides on Silicon", Defect and Diffusion Forum, Vols. 57-58, pp. 431-443, 1988
Online since
January 1988
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Price
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