Paper Title:
The Production of Periodic Surface Features by Sputtering and Related Processes
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 57-58)
Edited by
F. H. Wöhlbier
Pages
49-60
DOI
10.4028/www.scientific.net/DDF.57-58.49
Citation
G. Carter, I.V. Katardjiev, M.J. Nobes, "The Production of Periodic Surface Features by Sputtering and Related Processes", Defect and Diffusion Forum, Vols. 57-58, pp. 49-60, 1988
Online since
January 1988
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Price
$32.00
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