Paper Title:
The Behavior of Transition Metals in Silicon during Annealing Transients
  Abstract

  Info
Periodical
Edited by
D. Gupta, A.D. Romig and M.A. Dayananda
Pages
239-252
DOI
10.4028/www.scientific.net/DDF.59.239
Citation
D.R. Sparks, N.S. Alvi, M. A. Dayananda, "The Behavior of Transition Metals in Silicon during Annealing Transients", Defect and Diffusion Forum, Vol. 59, pp. 239-252, 1988
Online since
January 1991
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Price
$32.00
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