Paper Title:
Dopant and Ion Beam Enhanced Grain Growth in Polycrystalline Silicon Films
  Abstract

  Info
Periodical
Edited by
D. Gupta, A.D. Romig and M.A. Dayananda
Pages
33-46
DOI
10.4028/www.scientific.net/DDF.59.33
Citation
C.V. Thompson, "Dopant and Ion Beam Enhanced Grain Growth in Polycrystalline Silicon Films", Defect and Diffusion Forum, Vol. 59, pp. 33-46, 1988
Online since
January 1991
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Price
$32.00
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