Paper Title:
Activation Volumes of Impurity Diffusion in Silicon
  Abstract

  Info
Periodical
Defect and Diffusion Forum (Volumes 66-69)
Edited by
F.J. Kedves and D.L. Beke
Pages
415-420
DOI
10.4028/www.scientific.net/DDF.66-69.415
Citation
U. Södervall, A. Lodding, W. Gust, "Activation Volumes of Impurity Diffusion in Silicon", Defect and Diffusion Forum, Vols. 66-69, pp. 415-420, 1990
Online since
January 1991
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Price
$32.00
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