Paper Title:
Atomic Diffusion in Silicon
  Abstract

  Info
Periodical
Edited by
D. Gupta, H. Jain and R.W. Siegel
Pages
149-162
DOI
10.4028/www.scientific.net/DDF.75.149
Citation
S. T. Pantelides, "Atomic Diffusion in Silicon", Defect and Diffusion Forum, Vol. 75, pp. 149-162, 1991
Online since
January 1991
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Price
$32.00
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