Amorphization-Crystallization of Semiconductors during Ion Implantation as a Non-Equilibrium Phase Transitions |
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| Journal | Defect and Diffusion Forum (Volume 90) |
|---|---|
| Volume | Chaos and Stability in Defect Processes in Semiconductors |
| Edited by | I.V. Verner, N.N. Gerasimenko and J.W. Corbett |
| Pages | 170-0 |
| DOI | 10.4028/www.scientific.net/DDF.90.170 |
| Citation | Igor V. Verner et al., 1992, Defect and Diffusion Forum, 90, 170 |
| Authors | Igor V. Verner, Nikolai N. Gerasimenko, James W. Corbett |
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