Paper Title:
Amorphization-Crystallization of Semiconductors during Ion Implantation as a Non-Equilibrium Phase Transitions
  Abstract

  Info
Periodical
Edited by
I.V. Verner, N.N. Gerasimenko and J.W. Corbett
Pages
170-0
DOI
10.4028/www.scientific.net/DDF.90.170
Citation
I. V. Verner, N. N. Gerasimenko, J. W. Corbett, "Amorphization-Crystallization of Semiconductors during Ion Implantation as a Non-Equilibrium Phase Transitions", Defect and Diffusion Forum, Vol. 90, pp. 170-0, 1992
Online since
January 1992
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