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Electromigration in Stressed Metal Thin Films

Journal Defect and Diffusion Forum (Volumes 95 - 98)
Volume Diffusion in Materials
Edited by M. Koiwa, K. Hirano, H. Nakajima and T. Okada
Pages 257-262
DOI 10.4028/www.scientific.net/DDF.95-98.257
Citation K.N. Tu et al., 1993, Defect and Diffusion Forum, 95-98, 257
Authors K.N. Tu, D. Gupta
Keywords Effective Charge, Electromigration, Irreversible Thermodynamics, Microelectronic Devices, Stresses, Thin Film
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