Paper Title:
Effect of Microstructure on Diffusion Barrier Capability of RF-Sputtered Titanium and Zirconium Nitride Films
  Abstract

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Periodical
Defect and Diffusion Forum (Volumes 95-98)
Edited by
M. Koiwa, K. Hirano, H. Nakajima and T. Okada
Pages
667-672
DOI
10.4028/www.scientific.net/DDF.95-98.667
Citation
S. Maruno, P. Jin, I. Sakamoto, "Effect of Microstructure on Diffusion Barrier Capability of RF-Sputtered Titanium and Zirconium Nitride Films", Defect and Diffusion Forum, Vols. 95-98, pp. 667-672, 1993
Online since
January 1993
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