Paper Title:
Amorphization and Solid Phase Epitaxial Growth in Ion Implanted III-V Compound Semiconductors
  Abstract

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Periodical
Defect and Diffusion Forum (Volumes 95-98)
Edited by
M. Koiwa, K. Hirano, H. Nakajima and T. Okada
Pages
989-994
DOI
10.4028/www.scientific.net/DDF.95-98.989
Citation
M. Taniwaki, M. Yanaba, T. Yoshiie, Y. Hayashi, "Amorphization and Solid Phase Epitaxial Growth in Ion Implanted III-V Compound Semiconductors", Defect and Diffusion Forum, Vols. 95-98, pp. 989-994, 1993
Online since
January 1993
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