Deep Level Transient Spectroscopic Analysis of Annealing Process of Iron Ion Implanted Gallium Arsenide |
| Journal |
Defect and Diffusion Forum (Volumes 95 - 98) |
| Volume |
Diffusion in Materials - DIMAT 1992 |
| Edited by |
M. Koiwa, K. Hirano, H. Nakajima and T. Okada |
| Pages |
995-1000 |
| DOI |
10.4028/www.scientific.net/DDF.95-98.995 |
| Citation |
M. Taniwaki et al., 1993, Defect and Diffusion Forum, 95-98, 995 |
| Authors |
M. Taniwaki, H. Koide, Yasunori Hayashi |
| Keywords |
Deep-Level Transient Spectroscopy, Fe-Implantation, GaAs |
| Full Paper |
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