HA and HA+Y2O3 films were prepared by pulsed laser deposition. The microstructure and composition of films were studied by EPMA, XRD, AFM and SEM. In vitro study was performed by immersing the sample in simulate body fluid (SBF) in different days. There are more droplets on films prepared by HA+Y2O3 target than that of HA. And addition of Y2O3 can decrease the size of crystal grains. The XRD results show that the peaks corresponding to HA slightly shift to lower angel which indicates the HA lattice distorting due to addition of Y2O3. The critical load of the films increases from 10.3N to 13N when Y2O3 added. The film prepared by target HA+Y2O3 shows a higher resistance to dissolution and the precipitated grain size is small. New precipitated phases have similar functional groups with the original films.