Paper Title:
Preparation of a Thin Film of Al / Al2O3 Using a Single Source Precursor
  Abstract

  Info
Edited by
Jung-Ho Ahn and Yoo-Dong Hahn
Pages
279-282
DOI
10.4028/www.scientific.net/JMNM.15-16.279
Citation
M. Veith, K. Andres, "Preparation of a Thin Film of Al / Al2O3 Using a Single Source Precursor", Journal of Metastable and Nanocrystalline Materials, Vols. 15-16, pp. 279-282, 2003
Online since
April 2003
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Price
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