Paper Title:
Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD
  Abstract

Nanocrystalline diamond (NCD) films have been prepared by microwave plasma chemical vapor deposition (MWCVD) from methane/nitrogen mixtures, and the influence of the gas phase composition on the basic properties of the films (composition, morphology, topography, crystallinity and bonding structure) was investigated.

  Info
Edited by
M. Gupta and Christina Y.H. Lim
Pages
31-34
DOI
10.4028/www.scientific.net/JMNM.23.31
Citation
C. Popov, M. Jelínek, S. Boycheva, V. Vorlícek, W. Kulisch, "Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD", Journal of Metastable and Nanocrystalline Materials, Vol. 23, pp. 31-34, 2005
Online since
January 2005
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