Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD |
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| Journal | Journal of Metastable and Nanocrystalline Materials (Volume 23) |
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| Volume | Science and Technology of Nanomaterials |
| Edited by | M. Gupta and Christina Y.H. Lim |
| Pages | 31-34 |
| DOI | 10.4028/www.scientific.net/JMNM.23.31 |
| Citation | Cyril Popov et al., 2005, Journal of Metastable and Nanocrystalline Materials, 23, 31 |
| Authors | Cyril Popov, Miroslav Jelínek, S. Boycheva, V. Vorlícek, Wilhelm Kulisch |
| Keywords | Characterization, Microwave Plasma CVD, Nanocrystalline Diamond Film |
| Abstract | Nanocrystalline diamond (NCD) films have been prepared by microwave plasma chemical vapor deposition (MWCVD) from methane/nitrogen mixtures, and the influence of the gas phase composition on the basic properties of the films (composition, morphology, topography, crystallinity and bonding structure) was investigated. |
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