. Zinc Oxide nanowires (ZnO-NWs) were grown by vapor-liquid-solid (VLS) through chemical vapor deposition (CVD) with Au/Pd nanoparticles (Au/Pd-NPs) as catalyst. (Au/Pd)-NPs of 5 nm were synthesized by inert gas condensation technique (IGC), deposited on silicon substrates and characterized by atomic force microscopy (AFM). The substrate with the catalytic seeds was introduced in the reaction system where the ZnO-NWs were grown under different conditions such as: system pressure, position of the substrates with respect to the precursor material source, growth time and temperature. The nanostructures obtained were characterized by scanning electron microscopy (SEM), energy dispersed x-ray spectroscopy (EDX), X-ray diffraction (XRD) and transmission electron microscopy (TEM). The growth parameters and the effect of catalyst nanoparticles coalescence on the ZnO-NWs dimensions is also discussed in this work.