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Influence of Oxygen on the Development of Texture and Grain Morphology in Polycrystalline Al Thin Films

Journal Key Engineering Materials (Volume 103)
Volume Nonequilibrium Materials
Edited by J. Lendvai
Pages 207-210
DOI 10.4028/www.scientific.net/KEM.103.207
Citation M. Adamik et al., 1995, Key Engineering Materials, 103, 207
Authors M. Adamik, P.B. Barna, I. Tomov
Keywords Impurity, Morphology, Texture, Thin Film
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