Roles of Internal Stress and Morphology on Adhesion and Cohesion of Ion-Plated Nitride Films |
| Journal |
Key Engineering Materials (Volumes 111 - 112) |
| Volume |
Interfaces of Ceramic Materials |
| Edited by |
K. Uematsu, Y. Moriyoshi, Y. Saito and J. Nowotny |
| Pages |
225-252 |
| DOI |
10.4028/www.scientific.net/KEM.111-112.225 |
| Citation |
H. Ichimura, 1995, Key Engineering Materials, 111-112, 225 |
| Authors |
H. Ichimura |
| Keywords |
Acoustic Emission (AE), Adhesion, Cohesion, Internal Stress, Ion Plating, Morphology, Substrate Bias, Titanium Nitride TiN, Wear Resistance |
| Full Paper |
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