Magnetic Field in a Commercial Sputter Magnetron |
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| Journal | Key Engineering Materials (Volumes 118 - 119) |
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| Volume | Frontiers for Engineering Materials |
| Edited by | P.E. McHugh |
| Pages | 287-294 |
| DOI | 10.4028/www.scientific.net/KEM.118-119.287 |
| Citation | John Monaghan et al., 1996, Key Engineering Materials, 118-119, 287 |
| Authors | John Monaghan, D.C. Cameron, M.S.J. Hashmi |
| Keywords | Conformal Mapping, Magnetic Field, Magnetron Sputtering, Sputter Magnetron |
| Full Paper | 
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