Paper Title:
Magnetic Field in a Commercial Sputter Magnetron
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 118-119)
Edited by
P.E. McHugh
Pages
287-294
DOI
10.4028/www.scientific.net/KEM.118-119.287
Citation
J. Monaghan, D.C. Cameron, M.S.J. Hashmi, "Magnetic Field in a Commercial Sputter Magnetron", Key Engineering Materials, Vols. 118-119, pp. 287-294, 1996
Online since
March 1996
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Price
$32.00
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