Paper Title:
Reactions between SiCl4 and NH3 Leading to the Formation of Silicon Nitride Powders
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 132-136)
Main Theme
Edited by
P. Abelard, J. Baxter, D. Bortzmeyer et al.
Pages
149-152
DOI
10.4028/www.scientific.net/KEM.132-136.149
Citation
G. Ziegenbalg, T. Focke, H. Holldorf, R. Brink, H. Lange, "Reactions between SiCl4 and NH3 Leading to the Formation of Silicon Nitride Powders", Key Engineering Materials, Vols. 132-136, pp. 149-152, 1997
Online since
April 1997
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