Reactions between SiCl4 and NH3 Leading to the Formation of Silicon Nitride Powders |
| Journal |
Key Engineering Materials (Volumes 132 - 136) |
| Volume |
Euro Ceramics V |
| Edited by |
P. Abelard, J. Baxter, D. Bortzmeyer et al. |
| Pages |
149-152 |
| DOI |
10.4028/www.scientific.net/KEM.132-136.149 |
| Citation |
Gerald Ziegenbalg et al., 1997, Key Engineering Materials, 132-136, 149 |
| Authors |
Gerald Ziegenbalg, Thomas Focke, Horst Holldorf, Reinhold Brink, Horst Lange |
| Keywords |
Gas Phase Synthesis, Hot Wall Reactor, Mass Spectrometric Measurements, NH3, Powder Preparation, SiCl4, Silazanes |
| Full Paper |
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