Paper Title:
In Situ Study of Chemical Reactions during Growth of TiN Layer from Gas Phase
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 132-136)
Main Theme
Edited by
P. Abelard, J. Baxter, D. Bortzmeyer et al.
Pages
1560-1563
DOI
10.4028/www.scientific.net/KEM.132-136.1560
Citation
S. Jonas, W.S. Ptak, E. Walasek, I. Holyst, A. Czyżewska, "In Situ Study of Chemical Reactions during Growth of TiN Layer from Gas Phase", Key Engineering Materials, Vols. 132-136, pp. 1560-1563, 1997
Online since
April 1997
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Price
$32.00
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