Paper Title:
Phase Evolution during the Nitridation of Silicon with a Clay Additive
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 132-136)
Main Theme
Edited by
P. Abelard, J. Baxter, D. Bortzmeyer et al.
Pages
940-943
DOI
10.4028/www.scientific.net/KEM.132-136.940
Citation
S.P. Swenser, Y. B. Cheng, "Phase Evolution during the Nitridation of Silicon with a Clay Additive", Key Engineering Materials, Vols. 132-136, pp. 940-943, 1997
Online since
April 1997
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Price
$32.00
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