CVD Reactors for Coating TiN Thin Films onto a Tungsten Carbide Surface |
| Journal |
Key Engineering Materials (Volumes 138 - 140) |
| Volume |
Advanced Ceramic Tools for Machining Application - III |
| Edited by |
I.M. Low |
| Pages |
449-478 |
| DOI |
10.4028/www.scientific.net/KEM.138-140.449 |
| Citation |
Ping Ding et al., 1997, Key Engineering Materials, 138-140, 449 |
| Authors |
Ping Ding, Wei-Kang Yuan |
| Keywords |
Cutting Tools, CVD Reactor, Kinetics, Mathematical Modeling, Thermodynamic, TiN Coating, Transport Phenomena |
| Full Paper |
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