Characterization of Oxide Layers Deposited by Sol-Gel |
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| Journal | Key Engineering Materials (Volume 150) |
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| Volume | Sol-Gel Production |
| Edited by | Helmut Schmidt |
| Pages | 21-32 |
| DOI | 10.4028/www.scientific.net/KEM.150.21 |
| Citation | K. Bange, 1998, Key Engineering Materials, 150, 21 |
| Authors | K. Bange |
| Keywords | Composition, Density, Oxide Films, SiO2, Sol-Gel, Stress, Thin Film Analysis, Titania (TiO2) |
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