Paper Title:
Synthesis of Adhesive Silicon Nitride Thin Films by Static and Dynamic Ion Mixing Methods
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 159-160)
Edited by
Hiroshige Suzuki, Katsutoshi Komeya and Keizo Uematsu
Pages
293-298
DOI
10.4028/www.scientific.net/KEM.159-160.293
Citation
Y. Shima, H. Hasuyama, T. Hiramitsu, W.-Y. Fan, Y. Imaoka, T. Watari, K. Baba, R. Hatada, "Synthesis of Adhesive Silicon Nitride Thin Films by Static and Dynamic Ion Mixing Methods", Key Engineering Materials, Vols. 159-160, pp. 293-298, 1999
Online since
May 1998
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Price
$32.00
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